TOKYO (Reuters) - Semiconductor equipment maker ASML has sharply reduced defect rates in chips produced by a new lithography tool that uses cutting-edge immersion technology, Belgian research group ...
A new technical paper titled “Controlling Speckle Contrast Using Existing Lithographic Scanner Knobs to Explore the Impact on Line Width Roughness” was published by researchers at Samsung, ASML and ...
Dutch chip gear maker ASML has lifted the kimono its Twinscan XT:260, a new lithography scanner built for the brave new world of 3D chip packaging. The outfit claims that it is the first machine of ...
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